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differential sensor

1Piezoelectric transducer 1Piezoresistive silicon strain gauge 1displacement amplification 1flexure-based nanopositioner 1nanopositioner 1piezoelectric actuator 1piezoelectric transducer 1piezoresistive silicon strain gauge

1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Regnier, Stephane

1journal article 1thesis

Facets

1Piezoelectric transducer 1Piezoresistive silicon strain gauge 1displacement amplification 1flexure-based nanopositioner 1nanopositioner 1piezoelectric actuator 1piezoelectric transducer 1piezoresistive silicon strain gauge

1Boudaoud, Mokrane 1Chen, Zhiyong 1Ettefagh, Massoud Hemmasian 1Regnier, Stephane

1journal article 1thesis

Title
Creator
Date

Displacement amplification and piezo-sensing in differentially piezo-driven nanopositioners

Creator: Bazaei, Ali
Resource Type: thesis
Date: 2022

Piezo displacement sensors for a compact high-speed x–y nanopositioner in differential actuation mode

- Bazaei, Ali, Boudaoud, Mokrane, Ettefagh, Massoud Hemmasian, Chen, Zhiyong, Regnier, Stephane

Creator: Bazaei, Ali , Boudaoud, Mokrane , Ettefagh, Massoud Hemmasian , Chen, Zhiyong , Regnier, Stephane
Resource Type: journal article
Date: 2022

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